Lithium bis(trimethylsilyl)amide

Independent reference data for Lithium bis(trimethylsilyl)amide (CAS 4039-32-1), compiled from public chemistry databases.

Registry identifiers across databases

Computed descriptors

Physicochemical values on record

Documented uses on record

Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry; [HSDB]Semiconductor Manufacturing [Category: Industry]

Synonyms and trade names

Hexamethyldisilazane; 999-97-3; HMDS; Bis(trimethylsilyl)amine; 1,1,1,3,3,3-Hexamethyldisilazane; Hexamethylsilazane; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine; Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-; TSL 8802; hexamethyl disilazane; Disilazane, 1,1,1,3,3,3-hexamethyl-; SZ 6079; DTXSID2025395; H36C68P1BH; NSC-93895; DTXCID805395

Regulatory listings held on file

Regulatory & Food Contact	FDA Cumulative Estimated Daily Intake (CEDI): FCS
GHS notification summary	5.8% (35 / 606)

GHS hazard classification

GHS notification summary	5.8% (35 / 606)
Reported hazard statements	H225 (93.7%), H302, H332 (27.1%), H311 (88.6%), H314 (31.8%), H412 (85.5%), H320, H331

This chemical does not meet GHS hazard criteria for 5.8% (35 of 606) of reports.

H225 (93.7%): Highly Flammable liquid and vapor [Danger Flammable liquids]

What the public record says

Lithium bis(trimethylsilyl)amide · CAS 4039-32-1 · C6H19NSi2. UNII H36C68P1BH. Boiling Point: 125 °C; Boiling Point: 125 °C @760 [mm Hg]; Flash Point: 48 °F (NFPA, 2010).

Physical description and handling notes

Source: PubChem / Wikidata; the batch COA governs where values differ.